Particle measuring device
US12265010B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2022 |
| Grant date | Apr 1, 2025 |
| Priority date | — |
| Expiry date | Sep 15, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle measuring device includes a probe including a nozzle spraying a gas on a surface of an object and an inlet inhaling the gas and particles scattered from the surface by the gas; a main pipe including an inflow hole through which the gas flows and a discharge hole through which the gas is discharged; a first manifold provided to connect the main pipe to the nozzle, and supplying the gas to the nozzle; a second manifold provided to connect the main pipe to the inlet between a connecting portion of the first manifold and the discharge hole, and supplying the particles and the gas to the main pipe; a third manifold branched from the second manifold and supplying the particles and the gas; and a particle counter connected to the third manifold, and counting the particles included in the gas supplied through the third manifold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.