Patent · US Active

Method for producing a corrected image and apparatus

US12266088B2 · kind B2 · utility

0Cited by

1References

16Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Markus Neumann · Nuremberg, DE
Corinna Sommer · Munich, DE
David G. Knipp · San Jose, US

Key dates

Filing date	Apr 12, 2022
Grant date	Apr 1, 2025
Priority date	—
Expiry date	Aug 22, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30168
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Corrected images are produced with an apparatus that includes a detector and a control unit. In a first operating mode, a plurality of image tiles of an object are captured as a plurality of image pixels. The control unit generates commands to capture each image, such that it partially overlaps with at least one other image tile in an image tile overlap region having a minimum size. Each captured image tile and/or a resultant image is combined pixel-wise by calculation in a brightness correction image. In a second operating mode, the brightness correction image is produced by capturing a plurality of correction image tiles of the object as a plurality of image pixels, and control commands are generated, so the object is moved relative to a detection beam path and a size of a correction image overlap region is greater than the minimum size of the image tile overlap region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.