Semiconductor apparatus
US12268105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2023 |
| Grant date | Apr 1, 2025 |
| Priority date | — |
| Expiry date | Jul 10, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/8413
Abstract
A semiconductor apparatus may include a plurality of semiconductor unit devices. Each of the semiconductor unit devices may be arranged between a first insulating layer and a second insulating layer that are apart from each other in a direction normal to a substrate. Each of the semiconductor unit devices may include a selection device layer and a phase change material layer that extend side by side in a direction parallel to the substrate. The phase change material layer may have a superlattice-like structure. The phase change material layer may be arranged along a recess portion that is formed by the first insulating layer, the second insulating layer, and the selection device layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.