Method and apparatus for calculating a spatial map associated with a component
US12276918B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2021 |
| Grant date | Apr 15, 2025 |
| Priority date | — |
| Expiry date | Dec 7, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F17/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for calculating a spatial map associated with a component, the spatial map indicating spatial variations of thermal expansion parameters in the component, the method comprising: providing or determining a temperature distribution in the component as a function of time; calculating the spatial map associated with the component using the provided or determined temperature distribution in the component and optical measurements of a radiation beam that has interacted directly or indirectly with the component, the optical measurements being time synchronized with the provided or determined temperature distribution in the component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.