Patent · US Active

Method of manufacturing conductors for semiconductor device

US12278230B2 · kind B2 · utility

0Cited by
23References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 26, 2023
Grant dateApr 15, 2025
Priority date
Expiry dateJul 16, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0135
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method (of manufacturing conductors for a semiconductor device) includes: forming active regions (ARs) in a first layer, the ARs extending in a first direction; forming a conductive layer over the first layer; forming first, second and third caps over the conductive layer, the caps extending in a second direction perpendicular to the first direction, and the caps having corresponding first, second and third sensitivities that are different from each other; removing portions of the conductive layer not under the first, second or third caps resulting in gate electrodes under the first caps and first and second drain/source (D/S) electrodes correspondingly under the second or third caps; and selectively removing portions of corresponding ones of the first D/S electrodes and the second D/S electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.