Inventor · Taichung, TW

Ko-Bin Kao

21Patents
4h-index
51Co-inventors
62Inventor score

Filing activity: May 9, 2007 → Jun 26, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8728332B2 Methods of patterning small via pitch dimensions Electricity 148 Active
US9099530B2 Methods of patterning small via pitch dimensions Electricity 101 Active
US8563231B2 Patterning process and materials for lithography Physics 4 Active
US9613850B2 Lithographic technique for feature cut by line-end shrink Electricity 4 Active
US10388644B2 Method of manufacturing conductors and semiconductor device which includes conductors Electricity 3 Active
US9984876B2 Lithographic technique for feature cut by line-end shrink Electricity 2 Active
US11004709B2 Method for monitoring gas in wafer processing system Electricity 1 Active
US11688730B2 Method and system of manufacturing conductors and semiconductor device which includes conductors Electricity 1 Active
US10388523B2 Lithographic technique for feature cut by line-end shrink Electricity 1 Active
US11029603B2 Chemical replacement system Physics 1 Active
US10978439B2 Method and system of manufacturing conductors and semiconductor device which includes conductors Electricity 1 Active
US12025533B2 System and method for liquid leak detection Physics 0 Active
US11061333B2 Manufacturing method of semiconductor device and semiconductor processing system Electricity 0 Active
US11899368B2 Manufacturing method of semiconductor device and semiconductor processing system Electricity 0 Active
US11199466B2 System and method for liquid leak detection Physics 0 Active
US12278230B2 Method of manufacturing conductors for semiconductor device Electricity 0 Active
US10763113B2 Lithographic technique for feature cut by line-end shrink Electricity 0 Active
US11454891B2 Manufacturing method of semiconductor device and semiconductor processing system Electricity 0 Active
US8101340B2 Method of inhibiting photoresist pattern collapse Physics 0 Active
US9003336B2 Mask assignment optimization Electricity 0 Active
US10943802B2 Photoresist bottle container Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.