Ceramic susceptor
US12280566B2 · kind B2 · utility
0Cited by
1References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 31, 2023 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Oct 31, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/46
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided is a ceramic susceptor, which includes a ceramic plate with a radio-frequency electrode disposed therein, wherein the ceramic plate includes a connector connected to the radio-frequency electrode, the ceramic susceptor includes a rod having one end connected to the connector to supply power to the radio-frequency electrode, and the rod employs Mo, W, or an alloy thereof as a base material and includes a metal nitride film containing Cr on the surface of the base material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.