Patent · US Active

Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device

US12283456B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Andreas Schmaunz · Oberkochen, DE
Gero Walter · Lauchheim, DE
Bernd Stenke · Illertissen, DE
Gerald Schmid · Blaustein, DE

Key dates

Filing date	Dec 12, 2022
Grant date	Apr 22, 2025
Priority date	—
Expiry date	Dec 13, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/317
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A gas reservoir that receives a precursor has a gas-receiving unit which is arranged in a first receiving unit of a basic body and a sliding unit which is arranged movably in a second receiving unit of the basic body. The gas-receiving unit has a movable closure unit for opening or closing a gas outlet opening of the gas-receiving unit. In a first position of the sliding unit, a first opening of a sliding-unit line device is fluidically connected to a first basic body opening and a second opening of the sliding-unit line device is fluidically connected to a second basic body opening. In the second position of the sliding unit, the first opening is arranged at an inner wall of the second receiving unit and the second opening is arranged at the movable closure unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.