Transducer assembly with buried cavities and method of manufacturing the same
US12284480B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2022 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Apr 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/005
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure is directed to transducer assemblies or device in which one or more buried cavities are present within a substrate and define or form one or more membranes along a surface of the substrate. One or more piezoelectric actuators are formed on the one or more membranes and the one or more piezoelectric actuators drive the membranes at an operating frequency with an operating bandwidth of the transducer assemblies. Each of the one or more membranes is anchored at respective portions to a main body portion of the substrate to provide robust and strong anchoring of each of the one or more membranes to push unwanted flexure modes outside the operating bandwidth of the transducer assemblies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.