Marco Ferrera
40Patents
9h-index
47Co-inventors
75Inventor score
Filing activity: Mar 2, 1998 → Dec 14, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7437933B2 | Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof | Physics | 22 | Expired |
| US6689627B2 | Process for manufacturing micromechanical components in a semiconductor material wafer with reduction in the starting wafer thickness | Electricity | 22 | Expired |
| US6209394A | Integrated angular speed sensor device and production method thereof | Electricity | 18 | Expired |
| US6331444A | Method for manufacturing integrated devices including electromechanical microstructures, without residual stress | Physics | 17 | Expired |
| US6090638A | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Physics | 16 | Expired |
| US6387725B1 | Production method for integrated angular speed sensor device | Electricity | 15 | Expired |
| US6184052A | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Physics | 12 | Expired |
| USRE41889E1 | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | General | 10 | Expired |
| US8633553B2 | Process for manufacturing a micromechanical structure having a buried area provided with a filter | Performing Operations; Transporting | 9 | Active |
| US6109106A | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | Physics | 8 | Expired |
| US9804047B2 | Integrated pressure sensor with double measuring scale, pressure measuring device including the integrated pressure sensor, braking system, and method of measuring a pressure using the integrated pressure sensor | Physics | 8 | Active |
| US6197655A | Method for manufacturing integrated structures including removing a sacrificial region | Performing Operations; Transporting | 7 | Expired |
| US9327964B2 | Method for manufacturing a die assembly having a small thickness and die assembly relating thereto | Performing Operations; Transporting | 6 | Active |
| US6527961B1 | Method of manufacturing pressure microsensors | Physics | 5 | Expired |
| US9184138B2 | Semiconductor integrated device with mechanically decoupled active area and related manufacturing process | Electricity | 4 | Active |
| US6395618B2 | Method for manufacturing integrated structures including removing a sacrificial region | Electricity | 4 | Expired |
| US7800234B2 | Process for manufacturing deep through vias in a semiconductor device, and semiconductor device made thereby | Electricity | 3 | Active |
| US9061248B1 | Process for manufacturing a micromechanical structure having a buried area provided with a filter | Performing Operations; Transporting | 2 | Active |
| US10493758B2 | Fluid ejection device and printhead | Performing Operations; Transporting | 2 | Active |
| US11482248B2 | Read/write device for a hard-disk memory system, and corresponding manufacturing process | Electricity | 1 | Active |
| US9753279B2 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Emerging Cross-Sectional Technologies | 1 | Active |
| US10746982B2 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Emerging Cross-Sectional Technologies | 1 | Active |
| US9162876B2 | Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device | Performing Operations; Transporting | 1 | Active |
| US12284480B2 | Transducer assembly with buried cavities and method of manufacturing the same | Electricity | 0 | Active |
| US10974508B2 | Fluid ejection device with piezoelectric actuator and manufacturing process thereof | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.