Noble gas recovery system
US12285715B2 · kind B2 · utility
0Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2021 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Jul 27, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.