Patent · US Active

Evaporation apparatus, vapor deposition apparatus, and evaporation method

US12286703B2 · kind B2 · utility

0Cited by

1References

10Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Wolfgang BUSCHBECK · Hanau, DE
Stefan Bangert · Lauentheil, DE

Key dates

Filing date	Dec 15, 2023
Grant date	Apr 29, 2025
Priority date	—
Expiry date	Dec 15, 2043

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E60/10
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An evaporation apparatus is described, particularly for evaporating a reactive material such as lithium. The evaporation apparatus includes an evaporation crucible for evaporating a liquid material, a material conduit for supplying the liquid material to the evaporation crucible, and a valve configured to close the material conduit by solidifying a part of the liquid material in the material conduit with a cooling device. The valve may include a cooling gas supply for a cooling gas, and the cooling device may be configured to cool the liquid material with the cooling gas. Further described are a vapor deposition apparatus for coating a substrate as well as an evaporation method.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.