Coater cup deformation testing device and method of coater cup deformation testing
US12287195B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2021 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Feb 29, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A coater cup deformation testing device includes a supporting board, a first plate and a second plate. The first plate is located on a first side surface of the supporting board. The first plate is circular and has a first diameter. The second plate is located on the first plate or on a second side surface of the supporting board. The second side surface is opposite to the first side surface. The second plate is circular and has a second diameter less than the first diameter. An area of each of the first and second plates is less than an area of the supporting board. A projection of each of the first and second plates on the supporting board is formed within the supporting board.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.