Near field transducer with template layer for improved reliability
US12288568B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2024 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Apr 16, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2005/0021
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of fabricating a near field transducer (NFT) in a thermally assisted magnetic recording (TAMR) head is disclosed. In some embodiments, the method includes: depositing a dielectric layer and a template layer on a waveguide core; patterning the template layer to form a template; depositing an Au NFT layer; planarizing the Au NFT layer to generate a planar layer; depositing an upper NFT layer; applying a peg patterning mask; etching the upper NFT layer and the planar layer that includes the Au NFT layer; removing the template; and depositing a dielectric material and planarizing an upper surface that includes the upper NFT layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.