Modular foreline system
US12288696B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2021 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Nov 2, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A kit of parts for forming a foreline for coupling a process chamber to a vacuum pumping and/or abatement system, the kit comprising: a plurality of foreline segments; wherein each foreline segment is a pipe that comprises: a first substantially straight end portion; a second substantially straight end portion opposite to the first end portion; and an intermediate portion disposed between the first and second end portions and connected to the first and second end portions by respective bends; the first and second end portions are substantially parallel to each other; the intermediate portion is oblique to the first and second end portions; and the foreline segments are configured to be attached together so as to form a continuous foreline.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.