MEMS based light deflecting device and method
US12292565B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2020 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | Jun 30, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/03
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said stator and rotor. The electric circuit comprising one or more amplifiers configured to provide electric control signal to the one or more MEMS actuators to selectively vary position of said payload. The electric circuit comprises a sensing circuit configured for providing an alternating carrier signal and for monitoring said carrier signal to generate data on impedance of said one or more MEMS actuators indicative of position of the rotor with respect to the stator of said one or more MEMS actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.