Microelectromechanical systems device
US12294832B2 · kind B2 · utility
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1References
7Claims
0Family size
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Key dates
| Filing date | Jun 17, 2022 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | Oct 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2410/03
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.