Integrated circuit semiconductor device
US12295136B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2022 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | Jul 7, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/716
Abstract
An integrated circuit semiconductor device includes a lower electrode formed on a substrate extending in a first direction and a second direction perpendicular to the first direction and a support structure supporting the lower electrode. The support structure includes a support pattern surrounding the lower electrode, extending in the first direction and the second direction, and having a hole through which the lower electrode passes, and a concavo-convex structure having at a surface of the support pattern a plurality of convex portions extending in a third direction perpendicular to the first direction and the second direction, and a plurality of concave portions arranged between the convex portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.