Hybrid glass plastic flow cell and fabrication methods
US12296333B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Feb 18, 2022 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Sep 13, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein include various examples of a method for manufacturing aspects of flow cell. The method may include performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned, singulating the wafer into individual dies, orienting each die on a temporary substrate, where the orienting creates spaces between each individual die, and molding a material over the spaces to create a hybrid wafer comprised of glass and molded material. The method may also include bonding two of the hybrid wafers together, forming a bonded wafer stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.