Backscatter imaging device, control method and inspection system
US12298261B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2021 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Jan 2, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a backscatter imaging device, a control method and an inspection system. The backscatter imaging device includes a ray source assembly configured to emit rays to a scanning area; a backscatter detector array including a plurality of backscattering detectors and configured to receive scattered photons when the rays are backscattered by an object within the scanning area; and a first collimator assembly including a plurality of first collimating channels corresponding to the plurality of backscatter detectors respectively, arranged on one side of the backscatter detector array adjacent to the scanning area, and configured to align the scattered photons when the rays are backscattered by the object, and the plurality of backscatter detectors receive scattered photons corresponding to a plurality of depths in the object respectively; and at least part of the plurality of first collimation channels have an adjustable collimation angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.