Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride
US12304833B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 19, 2020 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Aug 10, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/80
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A tungsten hexafluoride manufacturing method of the present invention includes a reaction step of reacting tungsten containing arsenic or an arsenic compound with a gas of a fluorine element-containing compound so as to obtain a mixture containing tungsten hexafluoride and a trivalent arsenic compound, and a distillation step of distilling and purifying the mixture so as to separate and remove a fraction containing the trivalent arsenic compound and to obtain tungsten hexafluoride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.