Mitsuya Ohashi
11Patents
4h-index
17Co-inventors
57Inventor score
Filing activity: Apr 10, 1992 → Mar 19, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6659111B1 | Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas | Emerging Cross-Sectional Technologies | 280 | Expired |
| US6147006A | Cleaning gas | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6673262B1 | Gas for removing deposit and removal method using same | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7168436B2 | Gas for removing deposit and removal method using same | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7744769B2 | Gas for removing deposit and removal method using same | Emerging Cross-Sectional Technologies | 4 | Active |
| US7355060B2 | Method for producing organosilane | Chemistry; Metallurgy | 4 | Expired |
| US5234679A | Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity | Chemistry; Metallurgy | 2 | Expired |
| US7417167B2 | Process for producing carbonyl difluoride | Chemistry; Metallurgy | 1 | Expired |
| US12304833B2 | Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride | Chemistry; Metallurgy | 0 | Active |
| US9343774B2 | Method for producing a lithium hexafluorophosphate concentrated liquid | Emerging Cross-Sectional Technologies | 0 | Active |
| US7973390B2 | Modifier for low dielectric constant film, and method for production thereof | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.