Device for detecting a temperature, installation for producing an optical element and method for producing an optical element
US12321106B2 · kind B2 · utility
0Cited by
12References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2022 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Dec 10, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/062
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device (20) for detecting a temperature on a surface (15) of an optical element (14) for semiconductor lithography. The device includes Also disclosed are an installation (1) for producing a surface (15) of an optical element (14) for semiconductor lithography and a method for producing a surface (15) of an optical element (14) of a projection exposure apparatus (30), wherein the surface is temperature-controlled and the surface temperature is detected during the temperature control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.