Method of forming porous inorganic films via polymer swelling infiltration
US12331394B2 · kind B2 · utility
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2References
15Claims
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Key dates
| Filing date | Jul 22, 2023 |
| Grant date | Jun 17, 2025 |
| Priority date | — |
| Expiry date | Jul 22, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/407
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of forming an inorganic film on a surface can include depositing a polymer at a layer on a surface, swelling the polymer with a solvent to produce a swollen polymer on the surface, infiltrating the swollen polymer with a precursor, removing the swollen polymer after infiltrating the swollen polymer with the precursor, and forming a porous inorganic film on the surface based on removing the swollen polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.