Chiplet loader for microassembler
US12334377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2023 |
| Grant date | Jun 17, 2025 |
| Priority date | — |
| Expiry date | Dec 23, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67736
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A micro-assembly system includes a reservoir that stores a supply of chiplets suspended in a suspension fluid. Each of the chiplets has a bottom major surface that defines a right side down orientation. The system includes a delivery surface or belt that delivers the chiplets from the reservoir to an assembly surface. The system includes a micro assembler that may arrange the first subset of the chiplets in a pattern on the assembly surface. The micro assembler moves the first subset of chiplets towards a subsequent assembly stage. The micro assembler has an array of field generators fixed relative to the assembly surface that move the first subset of the chiplets along the assembly surface in response to signals applied to each of the field generators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.