Substrate transfer apparatus
US12334387B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 28, 2020 |
| Grant date | Jun 17, 2025 |
| Priority date | — |
| Expiry date | Jun 18, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/681
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transfer apparatus includes a base, an arm, an end effector provided at a tip of the arm and having first and second tip portions that are bifurcated, a light emitting unit, a light receiving unit, and a control device controlling an operation of the arm. The control device controls an operation of the arm so that light straightly traveling through a tip of the end effector scans edges of a plurality of substrates accommodated in a front opening unified pod (FOUP), and compares shape patterns of a measured waveform of an output value continuously changed in the light receiving unit with shape patterns of a reference waveform for comparison according to a relative positional relationship between the light and substrate during the operation of the arm and diagnoses at least one of a state of the substrate, the FOUP, and the end effector based on a comparison result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.