Patent · US Active

Facet assembly for a facet mirror

US12339587B2 · kind B2 · utility

0Cited by

2References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Joachim Hartjes · Aalen, DE
Alexander Wolf · Oberkochen, DE
Toralf Gruner · Hennef (Sieg), DE

Key dates

Filing date	Oct 5, 2022
Grant date	Jun 24, 2025
Priority date	—
Expiry date	Jun 7, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70266
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.