Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product

US12340973B2 · kind B2 · utility

Assignee

• Carl Zeiss MultiSEM GmbH · DE

Inventors

• Stefan Schubert · Oberkochen, DE
• Dieter Schumacher · Rendsburg, DE
• Erik Essers · Aalen, DE
• Ingo Mueller · Heidelberg, DE
• Arne Thoma · Heidenheim, DE
• Joerg Jacobi · Herbrechtingen, DE
• Wilhelm Bolsinger · Dischingen, DE
• Dirk Zeidler · Oberkochen, DE

Key dates

• Filing date: May 13, 2022
• Grant date: Jun 24, 2025
• Expiry date: Sep 13, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/0435
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.