Patent · US Active

Semiconductor device

US12356659B2 · kind B2 · utility

0Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 8, 2022
Grant dateJul 8, 2025
Priority date
Expiry dateOct 21, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0184
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A semiconductor device may include first and second active regions on a substrate, first and second active patterns on the first and second active regions, first and second source/drain patterns on the first and second active patterns, first and second silicide patterns on the first and second source/drain patterns, and first and second active contacts coupled to the first and second source/drain patterns. A lowermost portion of the first active contact is at a level higher than that of a lowermost portion of the second active contact. A thickness of the first silicide pattern is greater than that of the second silicide pattern.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.