Planarized crystalline films for diffractive optics
US12360383B2 · kind B2 · utility
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5References
17Claims
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Key dates
| Filing date | Nov 23, 2021 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Mar 29, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0125
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical device films and methods of forming optical device films having a RMS surface roughness less than about 2.2 μin and a refractive index greater than 2.0 are provided. In one embodiment, an optical device film is provided and includes a crystalline or nano-crystalline material having a refractive index greater than 2.0. A top surface of the optical device film has a root-mean-square (RMS) surface roughness less than about 2.2 microinches (μin).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.