Patent · US Active

Apparatus and method for depositing hard carbon layers

US12362141B2 · kind B2 · utility

0Cited by

5References

14Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Bert Scheffel · Dresden, DE
Matthias Tenbusch · Dresden, DE
Stefan Saager · Dresden, DE

Key dates

Filing date	Mar 17, 2023
Grant date	Jul 15, 2025
Priority date	—
Expiry date	Apr 10, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3132
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus and method for depositing a carbon layer includes an arc discharge is formed between an electron source and an evaporation material by means of a first power supply device. The negative terminal of the first power supply device is connected in an electrically conducting manner to the electron source and the positive terminal of the first power supply device is connected in an electrically conducting manner to the evaporation material. A permanent magnet system and a solenoid coil are arranged in a rotationally symmetrical manner around the evaporation material. The evaporation material is formed as a graphite rod which is surrounded by at least one heat-insulating element at least on the rod end to be evaporated of the graphite rod.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.