Inventor · Dresden, DE

Bert Scheffel

5Patents
3h-index
10Co-inventors
54Inventor score

Filing activity: Apr 29, 1996 → Mar 17, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5614273A Process and apparatus for plasma-activated electron beam vaporization Electricity 38 Expired
US6083356A Method and device for pre-treatment of substrates Electricity 5 Expired
US6086963A Method and device for control of a vacuum vaporization process Chemistry; Metallurgy 4 Expired
US5780803A Process for the stabilization of plasma generation by means of electron beam vaporizer Electricity 3 Expired
US12362141B2 Apparatus and method for depositing hard carbon layers Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.