Foreline assembly for quad station process module
US12362206B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2020 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Apr 10, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67745
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A foreline assembly for a quad station process module (QSM) is provided. In some examples, a foreline assembly comprises four inlets each connectable to a chamber port of a process module of the QSM and an outlet connectable directly or indirectly to a vacuum source. A first foreline bifurcation is disposed proximate the outlet of the foreline assembly. Two second bifurcations are each disposed between the first foreline bifurcation and a respective pair of the inlets. The first and second bifurcations divide the foreline assembly into three sections. A respective diameter of a foreline in each section increases stepwise at a respective bifurcation in a direction of gas flow from at least one of the inlets to the outlet of the foreline assembly and is constant within a respective section of the foreline assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.