Patent · US Active

Device for positioning and holding at least one optical element, measurement system

US12372884B2 · kind B2 · utility

0Cited by

3References

9Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Thomas Groezinger · Hamburg, DE
Semih Oeztuerk · Schorndorf, DE
Erik Loopstra · Eindhoven, NL
Anton F. Haase · Mühltal, DE

Key dates

Filing date	Jul 7, 2023
Grant date	Jul 29, 2025
Priority date	—
Expiry date	Feb 1, 2044

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70258
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Provided for herein is a device that includes a first base support rotatable about a first rotational axis perpendicular to a rest surface of the first base support; a second base support arranged on the first base support and rotatable about a second rotational axis perpendicular to the rest surface of the first base support; at least one third base support arranged on the second base support and rotatable about a third rotational axis perpendicular to the rest surface of the first base support; and a supporting element is arranged on the third base support and including a holding surface for holding at least one optical element, the holding surface being rotatable about a rotational axis perpendicular to the holding surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.