Volume filling cassette for load lock
US12374521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2022 |
| Grant date | Jul 29, 2025 |
| Priority date | — |
| Expiry date | Dec 23, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/204
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer chamber having a hollow interior, a first isolation door affixed to a first side of the transfer chamber and openable to the external environment, a second isolation door affixed to a second side of the transfer chamber and openable to an interior of the end station, and a volume filling cassette disposed within the hollow interior of the transfer chamber and adapted to hold at least one substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.