Identification codes on semiconductor chips
US12379666B2 · kind B2 · utility
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3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2023 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Feb 12, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/5448
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of generating chip-specific identification code marks on semiconductor chips includes patterning a resist layer over a semiconductor wafer by laser direct image exposure, the patterning including writing chip-specific identification codes into the resist layer over chip areas of the semiconductor wafer. The patterned resist layer is then developed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.