Transfer apparatus
US12384048B2 · kind B2 · utility
0Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2023 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Dec 3, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/681
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
With reference to a plurality of images formed by an imaging unit, the position of a robot hand to be inserted into a cassette at the time of unloading a workpiece from the cassette is determined. Hence, it is not necessary for an operator to recognize in advance configuration details of the cassette and a warp or bending of the workpiece accommodated in the cassette. Accordingly, the operator's work at the time of unloading the workpiece from the cassette is simplified.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.