Measurement apparatus and measurement method
US12386069B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 17, 2022 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Jun 15, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S7/497
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement apparatus including a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes of a main lobe, branch that splits the frequency-modulated laser beam into a reference light, a measurement light, and a monitor light, beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, extraction circuitry that extracts a signal component including a plurality of self-beat signals based on the main lobe from the monitor light, identification circuitry that identifies a cavity frequency of the optical cavity on the basis of the signal component, and calculation circuitry that calculates a difference between propagation distances between the reference light and the measurement light on the basis of the cavity frequency and the beat signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.