Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film
US12386252B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Aug 25, 2022 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Aug 25, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7015
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a pellicle film, which includes plural carbon nanotubes, in which an average value of linearity parameters represented by the following Formula (1) of the plurality of carbon nanotubes is 0.10 or less: linearity parameter=standard deviation Sa of a width of single tube/average value Aa of the width Formula (1):
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.