Inventor · Sodegaura, JP

Yosuke Ono

20Patents
3h-index
23Co-inventors
59Inventor score

Filing activity: Jul 21, 2010 → Aug 25, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9703187B2 Pellicle and EUV exposure device comprising same Physics 11 Active
US9841670B2 Support frame for pellicles Physics 5 Active
US10108084B2 Pellicle membrane, pellicle, original plate for exposure, exposure apparatus, and method of producing semiconductor device Physics 3 Active
US11042085B2 Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device Chemistry; Metallurgy 3 Active
US10216081B2 Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device Electricity 2 Active
US11204547B2 Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle Physics 1 Active
US9242504B2 Method and product of hydraulic transfer Performing Operations; Transporting 1 Active
US10585348B2 Pellicle, pellicle production method and exposure method using pellicle Physics 1 Active
US10606169B2 Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle Chemistry; Metallurgy 0 Active
US10261411B2 Pellicle film, pellicle frame, pellicle, and method for producing same Physics 0 Active
US12386252B2 Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film Physics 0 Active
US11243463B2 Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device Physics 0 Active
US10488751B2 Pellicle, production method thereof, exposure method Electricity 0 Active
US9776387B2 Method for producing transparent adhesive sheet for optical applications, transparent adhesive sheet for optical applications, and display device using same Emerging Cross-Sectional Technologies 0 Active
US10185217B2 Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device General 0 Revoked
US10895805B2 Pellicle manufacturing method and method for manufacturing photomask with pellicle Physics 0 Active
US10990001B2 Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device General 0 Revoked
US11852968B2 Pellicle, exposure master, exposure device and method for manufacturing semiconductor device Physics 0 Active
US10106660B2 Film containing a resin having a thiourethane bond and uses thereof Emerging Cross-Sectional Technologies 0 Active
US11137677B2 Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.