Substrate processing apparatus and substrate processing method
US12387955B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Jun 25, 2019 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Jul 12, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing apparatus is provided. The substrate processing apparatus for processing substrates includes a plurality of processing modules that perform predetermined processes on the substrates, and an information display that displays information about an error that occurred in the predetermined processes. The information display displays, in the same screen, a substrate on which a predetermined process in which the error occurred, a processing module which was performing the predetermined process in which the error occurred, the timing at which the error occurred, and a main cause of the error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.