Apparatus and method for vibration attenuation
US12392390B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2023 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Dec 14, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F2230/18
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure. The support structure is isolated from a base by a resilient vibration isolator. The apparatus includes a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module when the movable module is driven to move on the support structure, and a sensing system attached to the support structure for measuring a vibration parameter of the support structure, wherein the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the measured vibration parameter for attenuating vibration of the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.