Patent · US Active

Sensor for measuring a gas property

US12392744B2 · kind B2 · utility

0Cited by

5References

22Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Julia Isabel PEREZ BARRAZA · Unterhaching, DE
Matthias Eberl · Schweinhub, DE
Francesco Solazzi · Villach, AT

Key dates

Filing date	Dec 6, 2021
Grant date	Aug 19, 2025
Priority date	—
Expiry date	Feb 24, 2044

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

It is proposed a sensor for measuring a gas property, wherein the sensor comprises a semiconductor die, wherein the semiconductor die comprises a reference cavity and a measuring cavity, wherein a reference sensor element is arranged in the reference cavity, wherein a measuring sensor element is arranged in the measuring cavity, wherein the reference cavity is sealed from ambient gas, wherein the measuring cavity is fluidly connected to ambient gas. Further it is proposed a method for manufacturing such a sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.