Differential acoustic wave sensors
US12392754B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2020 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Feb 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acoustic wave sensor device, comprising an interdigitated transducer; a first reflection structure arranged on one side of the interdigitated transducer, and a second reflection structure arranged on another side of the interdigitated transducer; a first resonance cavity comprising a first upper surface and formed between the interdigitated transducer and the first reflection structure; a second resonance cavity comprising a second upper surface and formed between the interdigitated transducer and the second reflection structure; and wherein the second upper surface comprises a physical and/or chemical modification as compared to the first upper surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.