Enhanced jet impingement leak prevention for integrated circuit

US12392818B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Ruben Nunez Blanco · Gilbert, US
• Christopher Wade Ackerman · Phoenix, US
• Paul Diglio · Chandler, US
• Varun Narayan · Tempe, US
• Craig Yost · Montgomery, US
• Jensen STENBERG · Phoenix, US
• Kelly Lofgreen · Phoenix, US
• Joseph B. Petrini · Gilbert, US
• Sami Alelyani · Tempe, US

Key dates

• Filing date: Nov 29, 2022
• Grant date: Aug 19, 2025
• Expiry date: Oct 28, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L23/4735
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure describes systems, methods, and devices related to preventing water leakage from jet impingement applied to an integrated circuit under test. An integrated circuit testing apparatus for applying jet impingement to an integrated circuit may include an impingement chamber in contact with an integrated circuit being tested, the impingement chamber comprising water associated with cooling the integrated circuit; and an actuator-driven thermal management block including an air inlet configured to direct a flow of air into an immediate test environment for the integrated circuit to generate a positive pressure differential with respect to the water in the impingement chamber to prevent leakage of the water from the impingement chamber.