Method for illuminating a substrate using multiple acousto optical devices
US12393093B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2021 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Mar 11, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.