Methods and apparatus for reporting inlet pressure in mass flow controllers
US12393209B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 19, 2024 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Mar 23, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Mass flow control (MFC) devices capable of reporting inlet pressure and methods of reporting inlet pressure are provided. A mass flow controller (MFC) includes a chamber configured to receive a fluid, an upstream valve disposed upstream of the chamber, and a downstream control valve disposed downstream of the chamber. The MFC further includes a pressure sensor that detects fluid pressure in the chamber. The MFC further includes a controller configured to control actuation of the upstream valve. The controller is configured to toggle between two modes of reporting a measured inlet pressure. In a first mode, the controller reports a measured inlet pressure based on a reading from the pressure sensor and storing the reading to a buffer when the upstream valve is open. In a second mode, the controller reports the measured inlet pressure based on the reading stored to the buffer when the upstream valve is closed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.