Inventor · Tewksbury, MA, US

Junhua Ding

46Patents
11h-index
18Co-inventors
68Inventor score

Filing activity: Apr 21, 2005 → Jan 19, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7891228B2 Dual-mode mass flow verification and mass flow delivery system and method Physics 54 Active
US7474968B2 Critical flow based mass flow verifier Physics 48 Active
US7467027B2 Compensation for thermal siphoning in mass flow controllers Physics 23 Active
US8793082B2 Upstream volume mass flow verification systems and methods Physics 21 Active
US7706925B2 Integrated pressure and flow ratio control system Physics 19 Active
US7673645B2 Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement Emerging Cross-Sectional Technologies 19 Active
US7757554B2 High accuracy mass flow verifier with multiple inlets Physics 17 Active
US10031005B2 Method and apparatus for self verification of pressure-based mass flow controllers Emerging Cross-Sectional Technologies 16 Active
US7461549B1 Mass flow verifiers capable of providing different volumes, and related methods Physics 16 Active
US8997686B2 System for and method of fast pulse gas delivery Emerging Cross-Sectional Technologies 12 Active
US9557744B2 System for and method of monitoring flow through mass flow controllers in real time Emerging Cross-Sectional Technologies 11 Active
US10031531B2 System for and method of multiple channel fast pulse gas delivery Emerging Cross-Sectional Technologies 8 Active
US9348339B2 Method and apparatus for multiple-channel pulse gas delivery system Physics 8 Active
US8079383B2 Controller gain scheduling for mass flow controllers Emerging Cross-Sectional Technologies 6 Active
US10031004B2 Methods and apparatus for wide range mass flow verification Physics 6 Active
US10606285B2 System for and method of monitoring flow through mass flow controllers in real time Emerging Cross-Sectional Technologies 5 Active
US7621290B2 Gas delivery method and system including a flow ratio controller using antisymmetric optimal control Emerging Cross-Sectional Technologies 5 Active
US7296465B2 Vertical mount mass flow sensor Physics 4 Expired
US9846074B2 System for and method of monitoring flow through mass flow controllers in real time Emerging Cross-Sectional Technologies 4 Active
US8849466B2 Method of and apparatus for multiple channel flow ratio controller system Emerging Cross-Sectional Technologies 4 Active
US10649471B2 Method and apparatus for pulse gas delivery with isolation valves Physics 3 Active
US9952078B2 Upstream volume mass flow verification systems and methods Physics 3 Active
US10801867B2 Method and apparatus for self verification of pressured based mass flow controllers Emerging Cross-Sectional Technologies 3 Active
US10353408B2 System for and method of fast pulse gas delivery Emerging Cross-Sectional Technologies 3 Active
US10126760B2 System for and method of fast pulse gas delivery Emerging Cross-Sectional Technologies 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.