Fluid routing for a vacuum pumping system
US12394638B2 · kind B2 · utility
0Cited by
4References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 6, 2022 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Jun 24, 2042 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C25/02
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A fluid routing module for a vacuum pumping system, the fluid routing module comprising: a first fluid inlet; a second fluid inlet; a fluid outlet; a first fluid line coupled between the first fluid inlet and the fluid outlet; a second fluid line coupled between the second fluid inlet and the fluid outlet; a first restrictor configured to restrict a flow of the fluid therethrough, the first restrictor being disposed along the first fluid line; a vacuum pump disposed along the second fluid line; and one or more valves configured to selectably direct a fluid flow through either the first fluid line or the second fluid line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.