Piping structure and processing apparatus
US12398830B2 · kind B2 · utility
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11Claims
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Assignee
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Key dates
| Filing date | Mar 22, 2022 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | Jan 18, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16L9/20
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.